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TQRLC Datasheet(PDF) 1 Page - TriQuint Semiconductor |
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TQRLC Datasheet(HTML) 1 Page - TriQuint Semiconductor |
1 / 3 page Released Process TQTRx GaAs MESFET Foundry Service Semiconductors for Communications www.triquint.com TriQuint Semiconductor 2300 NE Brookwood Pkwy Hillsboro, Oregon 97124 Phone: 503-615-9000 Fax: 503-615-8905 Email: info@triquint.com Page 1 of 7; Rev 1.0 11/15/01 TQTRx Process Cross-Section Production Process TQRLC Advanced Passives Foundry Service Features • Thick 4 Layer Metal; > 9 µm total thickness • High Density Interconnects: • 3 Global • 1 Local • High-Q Passives; Inductor Q >50 @ 2 GHz • Low Cost: Passives Only • Thin Film Resistors • Dielectric Encapsulated Metals • Planarized Surface; simplified plastic packaging • Volume Production Process Applications • Passive Components: • Phase Shifters • Baluns • Transformers • Couplers • Mixers (with off-chip di- ode arrays) • Circuits Requiring High-Q Passive Elements • Matching Circuits • RF Module Front-End Filters • General RF and Microwave Imped- ance Matching General Description TriQuint’s TQRLC is a pure passives process. It is targeted at high performance, small size passive-only circuits and utilizes over 9 µm of gold metal. High density interconnections are ac- complished with three thick global and one surface metal inter- connect layers. The four metal layers are encapsulated in a high performance, low dielectric constant material that allows wiring flexibility and plastic packaging simplicity. Precision NiCr resis- tors, inductors, and high value MIM capacitors are available. The process is based on the TQTRx process, currently TriQuint’s highest volume process. The TQRLC process is available on 150-mm (6 inch) wafers. Semiconductors for Communications www.triquint.com TriQuint Semiconductor 2300 NE Brookwood Pkwy Hillsboro, Oregon 97124 Phone: 503-615-9000 Fax: 503-615-8905 Email: info@triquint.com Page 1 of 3; Rev 2.3 3/18/04 TQRLC Process Cross-Section |
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